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Pulsed Laser Deposition

Pulsed Laser Deposition (PLD) is an extremely versatile process to deposit thin films of complex composition. Our two excimer lasers together with four process chambers are used to grow amorphous, polycrystalline or epitaxial single crystalline films of oxides - especially thin film ferroelectrics or insulating oxides for field effect transistors or thin superconducting films, as YBa2Cu3O7. The powerful ultraviolet lasers are focussed onto the stoichometric targets and rapidly remove material from the target surface. It forms a plasma, which condenses onto heated substrates and permits epitaxial growth of thin film on these substrates. Growth rates exceed nanometers per second and a film thickness of 1 µm is routinely accomplished. The PLD process can be conducted under the admission of gases, as oxygen, nitrogen or others.


Different oxidesScandates as alternative gate dielectrics
Al2O3Binary oxides
TbMnO3conducting oxides
chalcogenide glassesYBa2Cu3O7-x

Epitaxial heterostructures (papers)

Luysberg, M.; Heidelmann, M.; Houben, L.; Boese, M.; Heeg, T.; Roeckerath, M.; Schubert, J.
Intermixing and charge neutrality at DyScO3/SrTiO3 interfaces
Acta Materialia 57 (2009) 3192-3198

Jia, C.L., Mi, S.B., Faley, M.; Poppe, U.; Schubert, J. ; Urban, K.
Oxygen octahedron reconstruction in the SrTiO3/LaAlO3 heterointerfaces investigated using aberration-corrected ultrahigh-resolution transmission electron microscopy
Physical Review B 79,(2009) 081405(R)

Cooperation with other groups in different research fields

Mairoser, T.; Mundy, J.A.; Melville, A.; Hodash, D.; Cueva, P.; Held, R.; Glavic, A.; Schubert, J.; Muller, D.A.; Schlom, D.G.; Schmehl, A.
High-quality EuO thin films the easy way via topotactic transformation
Nature Communications (2015), DOI: 10.1038/ncomms8716

Warusawithana, M.P.; Richter, C.; Mundy, J.A.; Roy, P.; Ludwig, J.; Paetel, S.; Heeg, T.; Pawlicki, A.A.; Kourkoutis, L.F.; Zheng, M.; Lee, M.; Mulcahy, B.; Zander, W.; Zhu, Y.; Schubert, J.; Eckstein, J.N.; Muller, D.A.; Hellberg, C.S.; Mannhart, J.; Schlom, D.G.
LaAlO3 stoichiometry is key to electron liquid formation at LaAlO3/SrTiO3 interfaces
Nature Communications (2013), DOI: 10.1038/ncomms3351

Lee, J. H.; Fang, L.; Vlahos, E.; Ke, X.; Jung, Y. W.; Fitting Kourkoutis, L.; Kim, J.W.; Ryan, P.; Heeg, T.; Roeckerath, M.; Goian, V.; Bernhagen, M.; Uecker, R.; Hammel, C.; Rabe, K. M.; Kamba, S.; Schubert, J.; Freeland, J. W.; Muller, D. A.; Fennie, C. J.; Schiffer, P.; Gopalan, V.; Johnston-Halperin, E. and Schlom, D. G.
A strong ferroelectric ferromagnet created by means of spin-phonon coupling
Nature, 499 (2010), 954 - 958

Schmehl, A.; Herrnberger, A.; Thiel, S.; Vaithyanathan,V.; Liberati, M.; Roeckerath, M.; Heeg, T.; Schubert, J.; Idzerda,Y.; Mannhart, J.; Schlom, D.G.
EuO - A Highly Versatile Half-Metallic Semiconductor Integrated with Silicon
Nature Materials, vol. 6, 11 (2007), 882-887

Ihlefeld, J.F.; Podraza, N.J.; Liu, Z.K.; Rai, R.C.; Xu, X.; Heeg, T.; Chen, Y.B.; Li, J.; Collins, R.W.; Musfeldt, J.L.; Pan, X.Q.; Schubert, J.; Ramesh, R. and Schlom, D.G.
Optical band gap of BiFeO3 grown by adsorption-controlled molecular-beam epitaxy
Appl. Phys. Lett. 92, (2008) 142908 (3 pages)

Kumar, A.; Rai, R.C.; Podraza, N.J.; Denev, S.; Ramirez, M.; Chu,Y.H.; Ihlefeld, J.F.; Heeg, T.; Schubert, J.; Schlom, D.G.; Orenstein, J.; Ramesh, R.; Collins, R.W.; Musfeldt, J.L.; Gopalan, V.
Linear and Nonlinear Optical Constants of BiFeO3
Appl. Phys. Lett. 92, (2008) 121915 (3 pages)

Choi, K.J.; Biegalski, M.; Li, Y.L.; Sharan, A.; Schubert, J.; Uecker, R.; Reiche, P.; Chen, Y.B.; Pan, X.Q.; Gopalan, V.; Chen, L.-Q.; Schlom, D.G.; Eom, C.B.
Enhancement of ferroelectricity in strained BaTiO3 thin films
Science 306 (2004) 5, 1005

Zurbuchen, M.A.; Freitas, R.S.; Wilson, M.J.; Schiffer, P.; Roeckerath, M.; Schubert, J.; Biegalski, M.D.; Mehta, G.H.; Comstock, D.J.; Lee, J.H., Jia, Y.; Schlom, D.G.
Synthesis and characterization of an n=6 Aurivillius phase incorporating magnetically active manganese, Bi7(Mn,Ti)6O21
Appl. Phys. Lett. 91, (2007) 033113 (3 pages)

Zeng, X.H.; Pogrebnyakov, A.V.; Zhu, M.H.; Jones, J.E.; Xi, X.X.; Xu, S.Y.; Redwing, J.M.; Lettieri, J.; Vaithyanathan, V.; Schlom, D.G.; Liu, Z.-K.; Trithaveesak, O.; Schubert, J.
Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical-chemical vapor deposition
Appl. Phys. Lett. 82, (2003), 13, S. 2097 - 2099

Schöning, M.J.; Tsarouchas, D.; Beckers, L.; Zander, W.; Schubert, J.; Kordos, P.; Lüth, H.
A highly long-term stable silicon-based pH sensor fabricated by pulsed laser deposition technique
Sensors and Actuators B 35, 228-233 (1996)

Cooperations partners

Prof. D.G. Schlom, Cornell University, Ithaca, NY, USA
Prof. J. Mannhart, MPI Stuttgart
Dr. T. Schroeder, IHP Frankfurt/Oder
Dr. P. Kuzel, University of Prague, Czech
Dr. V.V. Afanasiev, Leuven University, Belgium
Prof. M. Fardmanesh, Sharif University, Teheran, Iran
Prof. M. Schöning, TU Aachen
Prof. L. Jushkin, RWTH Aachen
Prof. J. Heitmann, TU Freiberg
Dr. U. Schröder, Namlab Dresden
Dr. U. Böttger, RWTH Aachen
Prof. M. Eizenberg, Technion Haifa, Israel